Instructor: Levent Beker - lbeker@ku.edu.tr

TAs: TBD

if you have any class/consent related questions please use this form to submit your request (KU login only): https://forms.gle/dByDe6QZQVpifNQ26

Prerequisites:

Graduate standing, 4th or 3rd-year undergrads in engineering or science. 
There is no prereq for this course as it relies on basic concepts from various disciplines, mainly, mechanical engineering, electrical engineering, and materials science.

Although some of the background material will be covered during the class, there is not enough time to cover all the details.

So everyone will need to do some independent study.

What you will learn:

• Intro to MEMS

• Frequency range of different applications and how scaling helps

• A quick recap of microfabrication methods

  • etch selectivity

  • film stress

• Beam as sensing and suspension element

• Resonance phenomena and its use in MEMS

• Equivalent circuits

  • Thermal circuits (micro heater)

  • Electro-mechanical circuits (resonator)

  • Electro-mechano-acoustic circuits (microphone)

• Transduction mechanisms

  • Capacitive sensing

  • Piezoelectric sensing

• Design

  • Resonator/filter

  • Gyroscope